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Nonlinear tracking control of a microbeam displacement by electrostatic actuation
, Article World Academy of Science, Engineering and Technology ; Volume 79 , July , 2011 , Pages 232-236 ; ISSN: 2010376X ; Layeghi, H ; Salarieh, H ; Alasti, A ; Sharif University of Technology
Abstract
In this study tracking problem of tip of a micro cantilever, actuated by electrostatic, is investigated. Dynamic model of the system is a PDE. Using electrostatic actuation.introduced significant nonlinearity in dynamic model of the system. Control goals are achieved by means of backstepping for SI and feedback linearization for MI system. Performance of control system is inspected for some assumptions and simplifications. The results are in according to numerical simulations
Nonlinear tracking control of a microbeam displacement by electrostatic actuation
, Article World Academy of Science, Engineering and Technology ; Volume 79 , 2011 , Pages 232-236 ; 2010376X (ISSN) ; Layeghi, H ; Salarieh, H ; Alasti, A ; Sharif University of Technology
2011
Abstract
In this study tracking problem of tip of a micro cantilever, actuated by electrostatic, is investigated. Dynamic model of the system is a PDE. Using electrostatic actuation introduced significant nonlinearity in dynamic model of the system. Control goals are achieved by means of backstepping for SI and feedback linearization for MI system. Performance of control system is inspected for some assumptions and simplifications. The results are in according to numerical simulations