Sharif Digital Repository

Today, in order to reach atomic scale resolution, novel nanolithography methods, known as unconventional nanolithography, have been presented, since conventional methods, including photolithography and scanning beam lithography are fundamentally unable to fulfill this need. In this work, a specific type of unconventional lithography, known as scanning probe lithography, is presented. Scanning probe lithography takes advantage of the interactions between a very sharp probe and the sample in nanoscale distances to control this distance, and hence enable the modification of the sample using this sharp probe. In mechanical scanning probe lithography, the probe is used mechanically to change the...