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    Observer design for a nano-positioning system using neural, fuzzy and ANFIS networks

    , Article Mechatronics ; Volume 59 , 2019 , Pages 10-24 ; 09574158 (ISSN) Bayat, S ; Nejat Pishkenari, H ; Salarieh, H ; Sharif University of Technology
    Elsevier Ltd  2019
    Abstract
    This paper focuses on the observer design for a 2D nano-positioner. In order to position the stage with a desired accuracy, it is required to adjust the stage displacements with a closed-loop control system. Since displacement and velocity of the main stage are not measured directly in the designed nano-positioning system, some observers should be designed to estimate these state variables using data provided by measurable variables. To this end, three different observers were designed based on neural, fuzzy and adaptive neuro fuzzy inference system (ANFIS) networks. With the purpose of obtaining data for training the observer model, a reference model is required. For this reason, the...