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Beyond pull-in stabilization of dual axis micromirrors using fuzzy controllers
, Article Proceedings of the ASME Design Engineering Technical Conference, 15 August 2010 through 18 August 2010 ; Volume 4 , August , 2010 , Pages 795-801 ; 9780791844120 (ISBN) ; Ahmadian, M. T ; Soroush, A ; Alasty, A ; Sharif University of Technology
2010
Abstract
Dual axis micromirrors are actuated using strongly nonlinear electrostatic actuation and their operating range suffers from the pull-in problem. So investigation of their dynamics and control issues has become a challenge for the researchers. The current paper makes use of fuzzy controllers for the purpose of stabilizing the dual axis micromirror at the desired tilt angles beyond pull-in. At first the dynamic model of the micromirror is presented. Then for the purpose of finding the linguistic laws governing the system behavior, several step voltages are introduced to the system. The proposed fuzzy controller consists of singleton fuzzifier, product inference engine and center average...
Nonlinear Vibration and Pull-in Analysis in Electrostatically Actuated Dual Axis Micromirrors
, M.Sc. Thesis Sharif University of Technology ; Ahmadian, Mohammad Taghi (Supervisor) ; Firoozbakhsh, Keykhosro (Supervisor)
Abstract
In recent decades, the important role of MEMS devices in optical systems has initiated the development of a new class of MEMS called Micro-Opto-Electro-Mechanical Systems (MOEMS), which torsional micromirror is one of these systems. Among variety kinds of micromirrors the dual axis micromirror has hopefully application such as high quality projection display, free-space fiber optical (FSO) communications and endoscopic optical coherence topography. Dual axis micromirror could play a key role in FSO applications such as satellite-to-satellite separated by hundreds of kilometers, as where. In medical applications, micromirror must could be able to rotates θ_x and θ_y.about two axis x and...