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Vibratory micromachined gyroscopes use suspending mechanical parts to measure rotation. They have no gyratory component that require bearings, and for this reason they can be easily miniaturized and batch production using micromachining methods. They operate based on the energy interchange between two modes of structural vibration. The objective of this paper is to study the oscillatory behavior of an electrostatically actuated vibrating microcantilever gyroscope with proof mass at its end. In the modelling, the effects of different nonlinearities, fringing field and base rotation are considered. The microgyroscope is subjected to coupled bending oscillations around the static deflection... 

In MEMS gyroscopes, it is essential to use matched resonance frequencies of the drive and sense vibrational modes for improving the sensitivity. For this end, the natural frequencies can be tuned by voltages. In this study, a new model is utilized to determine the natural frequencies of the doubly clamped beam microgyroscope. In the model, nonlinear electrostatic forces, fringing fields and mid-plane stretching of thebeam are considered. The system is actuated and sensed by electrostatic force and its natural frequencies and stiffness are detuned by DC voltages. The oscillatory problem of the gyroscope is analytically solved versus DC voltages for different design parameters. Copyright  

In this paper, vibration suppression of micro-or nano-scale beams subjected to nonlinear distributed electrostatic force is studied. For the sake of precision, we use the beam model derived from strain gradient elasticity theory aimed at prediction of size effect. In addition, the electrostatic force is considered with first order fringing field correction. The continuous model of the strain gradient beam is truncated by using Kantorovich method as a semi-analytical finite element method. A boundary control feedback law is proposed to suppress forced vibrations of the beam. Both measurements and actuations are taken place in the boundary to avoid spillover instabilities. Simulation results... 

This paper deals with the study of the small scale effect on the pull-in instability of nano-switches subjected to electrostatic and intermolecular forces. Using Eringen's nonlocal elasticity theory, the nonlocal Euler-Bernoulli beam model is derived through virtual displacement principle. The static governing equation which is extremely nonlinear due to the intermolecular and electrostatic attraction forces is solved numerically by differential quadrature method. The accuracy of the present method is verified by comparing the obtained results with the finite difference method and those in the literatures and very good agreement is obtained. Finally a comprehensive study is carried out to... 

This study investigates influence of fringing field effect on the voltage dependent behavior of electrostatically actuated micro-beams. For this purpose, the size dependent beam model is used. Strain gradient formulation is utilized to consider size effects. The effect of fringing field effect on the beam's behavior is investigated and it is shown that lack of considering the fringing field effect in the formulation of the problem may lead to considerable error in predicting the size dependent micro-beams behavior under the effect of electrostatic actuation. The results of this research can be used for safe and stable design of electrostatically actuated micro-beams  

In this paper, the two-point boundary value problem (BVP) of the nano-cantilever deflection subjected to Casimir and electrostatic forces is investigated using analytical and numerical methods to obtain the instability point of the nano-beam. In the analytical treatment of the BVP, the nonlinear differential equation of the model is transformed into the integral form by using the Green's function of the cantilever beam. Then, closed-form solutions are obtained by assuming an appropriate shape function for the beam deflection to evaluate the integrals. The pull-in parameters of the beam are computed under the combined effects of electrostatic and Casimir forces. Electrostatic microactuators... 

This paper provides a perspective on the current knowledge and potential areas of future research related to electrostatics in fluidized beds. Aspects addressed include characterization techniques, interplay between electrostatics and hydrodynamics, charge control methods, applications of tribo-electrostatic fluidization systems, and computational simulations which account for electrostatic forces, as well as other forces. This is a complex research field involving fluid mechanics, powders, and electrical physics. © 2021 CFB 2021 - Proceedings of the 13th International Conference on Fluidized Bed Technology. All rights reserved  

In this study, the static deflection and pull-in instability of the doubly clamped microbeam with a mass attached to its midpoint are investigated. Nonlinear electrostatic forces, fringing fields, base rotation and mid-plane stretching of the beam in this model are considered. First, a system of two nonlinear integro-differential equations are expressed in partial derivatives which describe coupled flexural-flexural motion of electrostatically actuated microbeam gyroscopes under rotation. Then static deflection and pull-in instability of the microgyroscopes acted upon by DC voltages in both (direction and sensing) directions are studied. The equations of static motion are reduced by... 

The operational range of microcantilever beams under electrostatic force can be extended beyond pull-in in the presence of an intermediate dielectric layer. In this paper, a systematic method for deriving dynamic equation of microcantilevers under electrostatic force is presented. This model covers the behavior of the microcantilevers before and after the pull-in including the effects of van der Waals force, squeeze-film damping, and contact bounce. First, a polynomial approximate shape function with a time-dependent variable for each configuration is defined. Using Hamilton's principle, dynamic equations of microcantilever in all configurations have been derived. Comparison between modeling... 

In this paper, static behavior and pull-in of micro tweezers is studied. The micro tweezer is modelled as two cantilever beams. Static behavior of the micro tweezer under the effect of electrostatic actuation is modelled using the Euler-Bernoulli beam theory. In order to capture size effects on the behavior of micro tweezers, modified couple stress theory is utilized. It is shown when the voltage between two electrodes increased from some specific value, micro beams adhere to each other and it is observed that the pull-in voltage predicted by the modified couple stress theory considerably differs with that of the classical theory of elasticity. Results of this paper can be used for accurate... 

With the successes in numerous applications from signal filtering to chemical and mass sensing, micro- and nano-electro-mechanical resonators continue to be one of the most widely studied topics of the micro-electro-mechanical systems community. Nonlinearities arising out of different sources such as mid-plane stretching and electrostatic force lead to a rich nonlinear dynamics in the time response of these systems which should be investigated for appropriate design and fabrication of them. Motivated by this need, present study is devoted to analyzing the nonlinear dynamics and chaotic behavior of nano resonators with electrostatic forces on both sides. Based on the potential function and... 

Microcantilever beams are frequently utilized in microelectromechanical systems. The operational range of microcantilever beams under electrostatic force can be extended beyond pull-in in the presence of an intermediate dielectric layer, which has a significant effect on the behavior of the system. Three possible configurations of the beam over the operational voltage range are floating, pinned, and flat configurations. In this paper, a systematic method for deriving dynamic equation of microcantilevers for all configurations is presented. First, a static study is performed on deflection profile of the microcantilever under electrostatic force. After that, a polynomial approximate shape... 

In this paper the two-point boundary value problem (BVP) of the cantilever deflection at nano-scale separations subjected to van der Waals and electrostatic forces is investigated using analytical and numerical methods to obtain the instability point of the beam. In the analytical treatment of the BVP, the nonlinear differential equation of the model is transformed into the integral form by using the Green's function of the cantilever beam. Then, closed-form solutions are obtained by assuming an appropriate shape function for the beam deflection to evaluate the integrals. In the numerical method, the BVP is solved with the MATLAB BVP solver, which implements a collocation method for... 

In this paper, a distributed parameter model is used to study the pull-in instability of cantilever type nanomechanical switches subjected to intermolecular and electrostatic forces. In modeling of the electrostatic force, the fringing field effect is taken into account. The model is nonlinear due to the inherent nonlinearity of the intermolecular and electrostatic forces. The nonlinear differential equation of the model is transformed into the integral form by using the Green's function of the cantilever beam. Closed-form solutions are obtained by assuming an appropriate shape function for the beam deflection to evaluate the integrals. The pull-in parameters of the switch are computed under... 

The nonlinear dynamic and static deflection of a micro/nano gyroscope under DC voltages and base rotation are investigated. The gyroscope undertakes two coupled bending motions along the drive and sense directions and subjected to electrostatic actuations and intermolecular forces. The nonlinear governing equations of motion for the system with the effect of electrostatic force, intermolecular tractions and base rotation are derived using extended Hamilton principle. Under constant voltage, the gyroscope finds the preformed shape. First, the deflection of the micro/nano gyroscope under electrostatic forces is obtained by static and dynamic analyses. Furthermore, the static and dynamic... 

Cantilever arrays with nearest-neighbor interactions are considered to obtain the pull-in parameters. The interactions between the neighboring beams are a combination of the Casimir force and the electrostatic force with the first-order fringing field correction. A set of coupled nonlinear boundary value problems and a set of coupled nonlinear equations arise in the distributed and lumped parameter modeling of the array, respectively. The models are simulated numerically to obtain the pull-in parameters of the arrays with different number of beams. The pull-in parameters of large arrays converge to constant values, which are independent of the number of beams in the array. The constants... 

In this paper, primary resonance of a double-clamped microbeam has been investigated. The Microbeam is predeformed by a DC electrostatic force and then driven to vibrate by an AC harmonic electrostatic force. Effects of midplane stretching, axial loads and damping are considered in modeling. Galerkin's approximation is utilized to convert the nonlinear partial differential equation of motion to a nonlinear ordinary differential equation. Afterward, a combination of homotopy perturbation method and the method of multiple scales are utilized to find analytic solutions to the steady-state motion of the microbeam, far from pull-in. The effects of different design parameters on dynamic behavior... 

Classical molecular dynamics simulations are used to compute the solvation free energy of two pharmaceutical solids, namely ibuprofen and acetaminophen in carbon dioxide (CO2), over the density range of interest in supercritical processes. In order to examine the influence of the solvent model on the resulting free energies, three popular CO2 models (Zhang, EPM2, and TraPPE) are studied. Relatively large discrepancies for the solvation free energy exist between these CO2 models, suggesting that the former is sensitive to the different balances between dispersive and electrostatic forces used in these models. In particular, for the solvation of the highly polar (dipole moment of ∼5.2 Debye)... 

In this paper, primary resonance of a double-clamped microbeam has been investigated. The Microbeam is predeformed by a DC electrostatic force and then driven to vibrate by an AC harmonic electrostatic force. Effects of midplane stretching, axial loads and damping are considered in modeling. Galerkin's approximation is utilized to convert the nonlinear partial differential equation of motion to a nonlinear ordinary differential equation. Afterward, a combination of homotopy perturbation method and the method of multiple scales are utilized to find analytic solutions to the steady-state motion of the microbeam, far from pull-in. The effects of different design parameters on dynamic behavior... 

This paper applies the homotopy perturbation method to the simulation of the static response of nano-switches to electrostatic actuation and intermolecular surface forces. The model accounts for the electric force nonlinearity of the excitation and for the fringing field effect. Using a mode approximation in the Galerkin projection method, the nonlinear boundary value differential equation describing the statical behavior of nano-switch is reduced to a nonlinear algebraic equation which is solved using the homotopy perturbation method. The number of included terms in the perturbation expansion for achieving a reasonable response has been investigated. Three cases have been specifically...