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A novel 3-dimentional ultra high precision positioning platform for micro machining cutting tools
, Article 3rd International Conference on Control, Automation and Robotics, ICCAR 2017, 22 April 2017 through 24 April 2017 ; 2017 , Pages 284-288 ; 9781509060870 (ISBN) ; Yadegari, A ; Rashidi, D ; Sharif University of Technology
Institute of Electrical and Electronics Engineers Inc
2017
Abstract
Ultra-high precision machining is proposed by externally actuating the work piece in linear motions in the X-Y plane and linear motion in the Z-axis. To solve the problems in the machining process such as nonlinearity and low repeatability positioning accuracy of machining tools in a larger scale, a novel platform for cutting tools in micro machining based on electrostatic linear micromotors and piezoelectric stack actuator system is presented. © 2017 IEEE