Sharif Digital Repository

This paper is concerned with the study of the oscillatory behavior of an electrostatically actuated microcantilever gyroscope with a proof mass attached to its free end. In mathematical modeling, the effects of different nonlinearities such as electrostatic forces, fringing field, inertial terms and geometric nonlinearities are considered. The microgyroscope is subjected to bending oscillations around the static deflection coupled with base rotation. The primary oscillation is generated in drive direction of the microgyroscope by a pair of DC and AC voltages on the tip mass. The secondary oscillation occurring in the sense direction is induced by the Coriolis coupling caused by the input... 

Vibratory micromachined gyroscopes use suspending mechanical parts to measure rotation. They have no gyratory component that require bearings, and for this reason they can be easily miniaturized and batch production using micromachining methods. They operate based on the energy interchange between two modes of structural vibration. The objective of this paper is to study the oscillatory behavior of an electrostatically actuated vibrating microcantilever gyroscope with proof mass at its end. In the modelling, the effects of different nonlinearities, fringing field and base rotation are considered. The microgyroscope is subjected to coupled bending oscillations around the static deflection... 

In this study vibration amplitude, frequency and damping of a microbeam is controlled using a RLC block containing a capacitor, resistor and inductor in series with the microbeam. Applying this method all of the considerable characteristics of the oscillatory system can be determined and controlled with no change in the geometrical and physical characteristics of the microbeam. Euler-Bernoulli assumptions are made for the microbeam and the electrical current through the microbeam is computed by considering the microbeam deflection and its voltage. Considering the RLC block, the voltage difference between the microbeam and the substrate is calculated. Two coupled nonlinear partial... 

In this study, the static deflection and pull-in instability of the doubly clamped microbeam with a mass attached to its midpoint are investigated. Nonlinear electrostatic forces, fringing fields, base rotation and mid-plane stretching of the beam in this model are considered. First, a system of two nonlinear integro-differential equations are expressed in partial derivatives which describe coupled flexural-flexural motion of electrostatically actuated microbeam gyroscopes under rotation. Then static deflection and pull-in instability of the microgyroscopes acted upon by DC voltages in both (direction and sensing) directions are studied. The equations of static motion are reduced by... 

The dynamic pull-in voltage as a criterion for the system stability is one of the most important effects considered with the dynamics of microstructures. In this study effect of microbeam electrical resistivity on the pull-in voltage of an electrostatically actuated microbeam is investigated. Assuming Euler-Bernoulli theory for the microbeam, two coupled nonlinear partial differential equations are derived for the beam deflection and voltage. The one parameter Galerkin method is implemented to transform the equations to a set of nonlinear coupled ordinary differential equations. Obtained equations are solved implementing the differential quadrature method (DQM). Variation of dynamic pull-in... 

In this study, a homotopy analysis method was used to obtain analytic solutions to predict dynamic pull-in instability of an electrostatically-actuated microbeam. The nonlinear describing equation of a microbeam affected by an electric field, including the fringing field effect, was obtained based on strain gradient elasticity, couple stress, and classical theory. Influences of different parameters on dynamic pull-in instability were investigated. The equation of motion of a double-clamped microbeam was discretized and solved by using Galerkin's method via mode summation. The resulting non-linear differential equation was also solved by using the Homotopy Analysis Method (HAM). The influence...