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Optimization of sputtering parameters for the deposition of low resistivity indium tin oxide thin films
, Article Acta Metallurgica Sinica (English Letters) ; Vol. 27, issue. 2 , Apr , 2014 , p. 324-330 ; Bagheri, B ; Yazdanfar, P ; Rashidian, B ; Sasanpour, P ; Sharif University of Technology
Abstract
Indium tin oxide (ITO) thin films have been deposited using RF sputtering technique at different pressures, RF powers, and substrate temperatures. Variations in surface morphology, optical properties, and film resistances were measured and analyzed. It is shown that a very low value of sheet resistance (1.96 ω/sq.) can be achieved with suitable arrangement of the deposition experiments. First, at constant RF power, deposition at different pressure values is done, and the condition for achieving minimum sheet resistance (26.43 ω/sq.) is found. In the next step, different values of RF powers are tried, while keeping the pressure fixed on the previously found minimum point (1-2 Pa). Finally,...
Effect of geometry, joule heating, and critical current on the responsivity of MOD superconducting transition edge sensors
, Article Journal of Superconductivity and Novel Magnetism ; Volume 26, Issue 4 , April , 2013 , Pages 831-834 ; 15571939 (ISSN) ; Moftakharzadeh, A ; Kokabi, A ; Vesaghi, M. A ; Fardmanesh, M ; Sharif University of Technology
2013
Abstract
By fabrication of several bolometric detectors on the YBCO film made of Metal-Organic Deposition (MOD) and the effect of pattering and film parameters on the optical responsivity of transition edge sensors is investigated. The low cost nonfluorine (MOD) method has been applied to fabricate YBCO thin films with different patterning parameters. The measurement results of the optical responsivity versus modulation frequency up to 100 KHz for these devices are reported