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Characterization of the ion beam current density of the rf ion source with flat and convex extraction systems
, Article Silicon ; Volume 10, Issue 6 , 2018 , Pages 2743-2749 ; 1876990X (ISSN) ; Zavarian, A. A ; Arman, A ; Hafezi, F ; Rad, G. A ; Mardani, M ; Hamze, K ; Luna, C ; Naderi, S ; Ahmadpourian, A ; Sharif University of Technology
Springer Netherlands
2018
Abstract
The characterization of ion beam current density distribution and beam uniformity is crucial for improving broad-beam ion source technologies. The design of the broad ion beam extraction system directly affects these two parameters, therefore, depending on the application, the design and geometry of the source is changed. In this study, the effect of the presence or the absence of a neutralization process on the ion beam density was investigated. Also, the effect of the probe bias on the ion beam current measurement was evaluated. Eventually, using a flat probe, the ion beam profiles obtained from the extraction system of the ion source (Model RFIS 60, ACECR, Iran) were measured at energies...