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    A holistic survey on mechatronic Systems in Micro/Nano scale with challenges and applications

    , Article Journal of Micro-Bio Robotics ; 2021 ; 21946418 (ISSN) Ghanbarzadeh Dagheyan, A ; Jalili, N ; Ahmadian, M. T ; Sharif University of Technology
    Springer Science and Business Media Deutschland GmbH  2021
    Micro/Nano mechatronic systems might be defined as systems that include nano- or micro-scale components. These components can be sensors, actuators, and/or physical structures. Furthermore, the high-precision control laws for such small scales are important to ensure stability, accuracy, and precision in these systems. In this writing, four categories of such small-scale systems are considered by providing multifarious novel or key examples from the literature: control engineering and modeling, design and fabrication, measurement engineering, and sensor/actuator development. The applications discussed in the examples vary from nano-positioners, crucial in systems such as atomic force...