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The objective of this work is to create an analytical framework to study the problem of squeezed film damping in micromirrors considering the bending of the supporting torsion microbeams. Using mathematical and physical justifications, nonlinear Reynolds equation governing the behavior of the squeezed gas underneath the mirror is linearized. The resulting linearized equation is then nondimensionalized and analytically solved for two cases of the infinitesimal and finite tilting angle of the mirror. The obtained pressure distribution from the solution of the Reynolds equation is then utilized for finding the squeezed film damping force and torque applied to the mirror. The results show that... 

In the current paper, Extended Kantorovich Method (EKM) has been utilized to analytically solve the problem of squeezed film damping in micromirrors. A one term Galerkin approximation is used and following the extended Kantorovich procedure, the solution of the Reynolds equation which governs the squeezed film damping in micromirrors is reduced to solution of two uncoupled ordinary differential equation which can be solved iteratively with a rapid convergence for finding the pressure distribution underneath the micromirror. It is shown that the EKM results are independent of the initial guess function. It is also shown that since EKM is highly convergent, practically one iterate is...