Sharif Digital Repository

Micro/Nano mechatronic systems might be defined as systems that include nano- or micro-scale components. These components can be sensors, actuators, and/or physical structures. Furthermore, the high-precision control laws for such small scales are important to ensure stability, accuracy, and precision in these systems. In this writing, four categories of such small-scale systems are considered by providing multifarious novel or key examples from the literature: control engineering and modeling, design and fabrication, measurement engineering, and sensor/actuator development. The applications discussed in the examples vary from nano-positioners, crucial in systems such as atomic force...