Sharif Digital Repository

Micro grippers are essential tools for manipulation of objects in micron size. An electrostatic micro stepper-motor is used for actuating a proposed gripper mechanism and performance of this gripper is compared with the previous ones. The characteristic of the proposed mechanism is analyzed by simulation and it is shown that the designed gripper has the capability of doing manipulation in micron dimension with an acceptable performance  

A sensitive half-bridge MEMS accelerometer fabricated by sequential and pulsed-mode processes is presented in this paper. The proposed accelerometer is analyzed by using conventional equations and the finite element method. The micromachining technology used in this work relies on two processes: sequential and pulsed-mode. In the sequential deep reactive ion etching process, a mixture of hydrogen and oxygen with a trace value of SF6 is used instead of polymeric material in the passivation step. The pulsed-mode process employs periodic hydrogen pulses in continuous fluorine plasma. Because of the continuous nature of this process, plus the in situ passivation caused by the hydrogen pulses,... 

Development of a new micro gas sensor is essential for the analysis of the outcome of gas separation devices. In this paper, direct simulation Monte Carlo (DSMC) modeling of low-pressure gas sensor was performed to investigate the effect of physical parameters on the performance and main characteristics of this type of actuator in various operating conditions. Extensive parametric studies were done and the effect of ambient pressure, temperature and gap of arms were comprehensively investigated. Our findings showed that gap size significantly influences the flow features and force generation inside the sensor. © 2018 Bulgarian Academy of Sciences, Union of Chemists in Bulgaria  

With the successes in numerous applications from signal filtering to chemical and mass sensing, micro- and nano-electro-mechanical resonators continue to be one of the most widely studied topics of the micro-electro-mechanical systems community. Nonlinearities arising out of different sources such as mid-plane stretching and electrostatic force lead to a rich nonlinear dynamics in the time response of these systems which should be investigated for appropriate design and fabrication of them. Motivated by this need, present study is devoted to analyzing the nonlinear dynamics and chaotic behavior of nano resonators with electrostatic forces on both sides. Based on the potential function and... 

This paper introduces a novel approach for measuring low pressures based on MEMS technology. In this technique the mechanism of squeeze film damping is used. A voltage is applied to a fixed-fixed MEMS beam and its step response is obtained; for each pressure there is a different response. Then the settling time is measured and we can relate each settling time with a defined pressure. Here, first we use some equations to relate pressure with the squeeze film damping effect; after that we use a micro beam model and relate its parameters with pressure. Then we use numerical analysis and simulation to show the procedure of pressure measuring. All simulation results are shown and discussed  

With the rapid development of micro/nano-electro-mechanical systems (MEMS/NEMS), arch shaped resonators are becoming increasingly attractive for different applications. Nevertheless, the dynamics of bistable resonators is poorly understood, and the conditions for their appropriate performance are not well known. In this paper, an initially curved arch shaped MEMS resonator under combined DC and AC distributed electrostatic actuation is investigated. A reduced order model obtained from first mode Galerkin's decomposition method is used for numerical and analytical investigations. We have used the Homotopy Analysis Method (HAM) in order to derive analytical solutions both for the amplitude and... 

Currently, the thermal management of microelectromechanical systems (MEMS) has become a challenge. In the present research, a micro pulsating heat pipe (MPHP) with a hydraulic diameter of 508 lm, is experimented. The thermal performance of the MPHP in both the transient and steady conditions, the effects of the working fluid (water, silver nanofluid, and ferrofluid), heating power (4, 8, 12, 16, 20, 24, and 28 W), charging ratio (20, 40, 60, and 80%), inclination angle (0 deg, 25 deg, 45 deg, 75 deg, and 90 deg relative to horizontal axis), and the application of magnetic field, are investigated and thoroughly discussed. The experimental results show that the optimum charging ratio for water... 

Micro-electro-mechanical systems (MEMS) such as sensors and actuators are rapidly gaining popularity in a variety of industrial applications. Usually these systems are constructed by a cantilever beam or plate along with a fixed substrate. The movable beam or plate deflects due to applied voltage between the plates. Pull-in voltage and contact time are the most important characteristic of these systems. Allowing the substrate to be movable in vertical direction pull-in voltage in comparison with the fixed substrate is expected to be much smaller. In this paper the pull-in voltage and the point at which pull-in takes place for a fully clamped microplate is evaluated. The nonlinear... 

In this study tracking problem of tip of a micro cantilever, actuated by electrostatic, is investigated. Dynamic model of the system is a PDE. Using electrostatic actuation introduced significant nonlinearity in dynamic model of the system. Control goals are achieved by means of backstepping for SI and feedback linearization for MI system. Performance of control system is inspected for some assumptions and simplifications. The results are in according to numerical simulations  

MEMS rate gyroscopes are prone to different errors because of environmental conditions and manufacturing errors. These errors can result to mismatch between the fabricated gyros and the designed ones. Different environmental conditions and disturbances can change the parameters and specifications of a gyro, and its sensitivity may deteriorate, since the parameters are different from the optimal ones. External linear acceleration is one of the main environmental disturbances that may change the behavior of an MEMS rate gyro that its effect on the accuracy of an MEMS proof mass gyroscope is found here. This is done by finding the equations of motion of gyroscope in presence of acceleration and... 

In this study, homotopy analysis method is used to derive analytic solutions to predict dynamic pull-in instability of electrostatically-actuated microsystems. The model considers midplane stretching, initial stress, distributed electrostatic force and fringing fields effect. Influences of different parameters on dynamic pull-in instability are investigated. Results are in good agreement with numerical and experimental findings. © 2009 Elsevier Ltd. All rights reserved  

The rapid progress in fabricating and utilizing micro-electromechanical systems during the last decade has not been matched by the corresponding advances in our understanding from the unconventional physics involved in manufacturing and operation of micro devices. To avoid the complexity encountered in modeling of nonlinear Boltzmann equations, the Navier-Stokes equations can be solved considering the slip flow regime concepts. The modeling can be achieved via employing suitable slip velocity boundary conditions at the solid walls. The modified first-order slip models can, in some cases, extend the range of applicability of the Navier-Stokes solvers to around and beyond Kn=0.1, where the...