Sharif Digital Repository

Conventional continuum theory does not account for contributions from length scale effects which are important in modeling of nano-beams. Failure to include size-dependent contributions can lead to underestimates of deflection, stresses, and pull-in voltage of electrostatic actuated micro and nano-beams. This research aims to use nonlocal and strain gradient elasticity theories to study the static behavior of electrically actuated micro- and nano-beams. To solve the boundary value nonlinear differential equations, analogue equation and Gauss–Seidel iteration methods are used. Both clamped-free and clamped–clamped micro- and nano-beams under electrostatical actuation are considered where... 

With the successes in numerous applications from signal filtering to chemical and mass sensing, micro- and nano-electro-mechanical resonators continue to be one of the most widely studied topics of the micro-electro-mechanical systems community. Nonlinearities arising out of different sources such as mid-plane stretching and electrostatic force lead to a rich nonlinear dynamics in the time response of these systems which should be investigated for appropriate design and fabrication of them. Motivated by this need, present study is devoted to analyzing the nonlinear dynamics and chaotic behavior of nano resonators with electrostatic forces on both sides. Based on the potential function and... 

A sensitive half-bridge MEMS accelerometer fabricated by sequential and pulsed-mode processes is presented in this paper. The proposed accelerometer is analyzed by using conventional equations and the finite element method. The micromachining technology used in this work relies on two processes: sequential and pulsed-mode. In the sequential deep reactive ion etching process, a mixture of hydrogen and oxygen with a trace value of SF6 is used instead of polymeric material in the passivation step. The pulsed-mode process employs periodic hydrogen pulses in continuous fluorine plasma. Because of the continuous nature of this process, plus the in situ passivation caused by the hydrogen pulses,... 

In this research, thermal buckling and forced vibration characteristics of the imperfect composite cylindrical nanoshell reinforced with graphene nanoplatelets (GNP) in thermal environments are presented. Halpin–Tsai nanomechanical model is used to determine the material properties of each layer. The size-dependent effects of GNPRC nanoshell is analyzed using modified couple stress theory. For the first time, in the present study, porous functionally graded multilayer couple stress (FMCS) parameter which changes along the thickness is considered. The novelty of the current study is to consider the effects of porosity, GNPRC, FMCS and thermal environment on the resonance frequencies, thermal... 

In this study, influences of intermolecular forces on the dynamic pull-in instability of electrostatically actuated beams are investigated. The effects of midplane stretching, electrostatic actuation, fringing fields, and intermolecular forces are considered. The boundary conditions of the beams are clamped-free and clamped-clamped. A finite-element model is developed to discretize the governing equations, and Newmark time discretization is then employed to solve the discretized equations. The static pull-in instability is investigated to validate the model. Finally, dynamic pull-in instability of cantilevers and double-clamped beams are studied considering the Casimir and van der Waals... 

Inertial navigation is a method for determining position and orientation of a vehicle, which operates according to Newton's laws of motion. Due to continual increase of output error because of measurement noise, bias, misalignment and so on, one may need one or more additional navigation systems to improve accuracy in long-Term navigation. In this paper, the error compensation based on GPS/INS data fusion algorithm is studied. Then, by designing a DSP processor-based hardware, GPS and INS data are recorded and GPS/INS data fusion algorithm is implemented. Results indicate that the accuracy of the positioning is improved and position, velocity, and orientation errors are confined to a limited... 

Micro-rotating disks are extensively used in micro-electromechanical systems such as micro-gyroscopes and micro-rotors. Because of the sensitivity of these elements, enough knowledge about the mechanical behavior of these structures is an essential matter for designers and fabricators. The small-scale effects on the in-plane free vibration of such micro-disks present an important aspect of the mechanical behavior of these elements. The small-scale effects on the in-plane free vibration of these micro-disks are investigated in this study using the modified couple stress theory. By using the Hamilton principle, the partial differential equations governing the coupled radial and tangential... 

Applicable in numerous fields, low-cost micro-electromechanical system inertial measurement units often require on-sight calibration by the end user due to the existence of systematic errors. A 9-degrees of freedom inertial measurement unit comprises a tri-axis accelerometer, a tri-axis gyroscope, and a tri-axis magnetometer. Various proposed multi-position calibration methods can calibrate tri-axis accelerometers and magnetometers to a degree. Yet the full calibration of a tri-axis gyroscope and axis alignment of all the sensors still often requires equipment such as a rate table to generate a priori known angular velocities and attitudes or relies on the disturbance-prone magnetometer... 

In this research, a functionally graded microbeam bonded with piezoelectric layers is analyzed under electric force. Static and dynamic instability due to the electric actuation is studied because of its importance in micro electro mechanical systems, especially in micro switches. In order to prevent pull-in instability, two piezoelectric layers are used as sensor and actuator. A current amplifier is used to supply input voltage of the actuator from the output of the sensor layer. Using Hamilton's principle and Euler-Bernoulli theory, equation of motion of the system is obtained. It is shown that the load type (distributed or concentrated) applied to the microbeam from the piezoelectric...