Sharif Digital Repository

A numerical procedure is proposed for obtaining the static deflection, pull-in (PI) deflection and PI voltage of electrostatically excited capacitive microcantilever beams. The method is not time and memory consuming as Finite Element Analysis (FEA). Nonlinear ordinary differential equation of the static deflection of the beam is derived, w/wo considering the fringing field effects. The nondimensional parameters upon which PI voltage is dependent are then found. Thereafter, using the parameters and the numerical method, three closed form equations for pull-in voltage are developed. The results are in good agreement with others in literature. Copyright © 2006 by ASME  

In this paper, the tip tracking control problem of a Timoshenko micro-cantilever beam is investigated. The beam is actuated by a piezoelectric layer laminated on one side of the beam. Dynamic equations of the beam and piezoelectric layer are found using the Hamilton principle. By employing the Galerkin projection method, state space representation of the system is derived. Then, a cascade control loop is used for tracking control of the beam's tip. The cascade control structure consists of an inner loop stabilizer and an outer loop proportional-integral-derivative controller. The stabilizer has a linear feedback form whose states are obtained through a linear observer which is based on the... 

The operational range of microcantilever beams under electrostatic force can be extended beyond pull-in in the presence of an intermediate dielectric layer. In this paper, a systematic method for deriving dynamic equation of microcantilevers under electrostatic force is presented. This model covers the behavior of the microcantilevers before and after the pull-in including the effects of van der Waals force, squeeze-film damping, and contact bounce. First, a polynomial approximate shape function with a time-dependent variable for each configuration is defined. Using Hamilton's principle, dynamic equations of microcantilever in all configurations have been derived. Comparison between modeling... 

In this paper, the tip tracking control problem of a Timoshenko micro-cantilever beam is investigated. The beam is actuated by a piezoelectric layer laminated on one side of the beam. Dynamic equations of the beam and piezoelectric layer are found using the Hamilton principle. By employing the Galerkin projection method, state space representation of the system is derived. Then, a cascade control loop is used for tracking control of the beam's tip. The cascade control structure consists of an inner loop stabilizer and an outer loop proportional-integral-derivative controller. The stabilizer has a linear feedback form whose states are obtained through a linear observer which is based on the... 

Improvement of microcantilever-based sensors and actuators chiefly depends on how comprehensively they are modeled and precisely formulated. Atomic Force Microscopy (AFM) is the most widespread application of microcantilever beam as a sensor, which is usually influenced by the tip-sample interaction force. For this, vibration of AFM microcantilever probe is analyzed in this paper, along with analytical, numerical and experimental investigation of the influence of the sample interaction force on the microcantilever vibration. Nonlinear integro-partial equation of microcantilever vibration subject to the tip-sample interaction is then derived and numerically simulated. Moreover, multiple time... 

Microcantilever beams are frequently utilized in microelectromechanical systems. The operational range of microcantilever beams under electrostatic force can be extended beyond pull-in in the presence of an intermediate dielectric layer, which has a significant effect on the behavior of the system. Three possible configurations of the beam over the operational voltage range are floating, pinned, and flat configurations. In this paper, a systematic method for deriving dynamic equation of microcantilevers for all configurations is presented. First, a static study is performed on deflection profile of the microcantilever under electrostatic force. After that, a polynomial approximate shape... 

Considerable attention has been devoted recently to vibration control using intelligent materials as sensor/actuator. An intelligent control technique using a neural network is proposed for vibration control of micro-cantilever beam with bonded piezoelectric sensor and actuator. Structure modal characteristic analysis is done to determine the optimal configuration of piezoelectric sensor and actuator. With the piezoelectric elements are surface-bonded near the same position to the fixed end of micro-cantilever beam, an optimal controller, linear quadratic Gaussian (LQG), and an intelligent strategy based on neural network are investigated. Finally, the simulation results are given to... 

In this paper, two lowest resonant frequencies and sensitivities of an AFM V-Shaped microcantilever made of functionally graded materials are studied. The beam is modeled by Euler-Bernoulli beam theory in which rotary inertia and shear deformation is neglected. It is assumed that the beam is made of a mixture of metal and ceramic with properties varying through the thickness of the beam. This variation is function of volume fraction of beam material constituents. The interaction between AFM tip and surface is modeled by two linear springs which expresses the normal and lateral contact stiffness. A relationship is developed to evaluate the sensitivity of FGM micro cantilever beam. Effect of... 

The purpose of this paper is the enhancement of the AFM sensitivity through the selection of an optimized FGM micro cantilever beam. In this paper, resonant frequencies and sensitivities of first two modes of micro cantilever which is made of functionally graded materials are investigated and a relationship is developed to evaluate the sensitivity of FGM micro cantilever. Effect of volume fraction of materials and surface contact stiffness on the resonant frequencies and sensitivities are studied. The rectangular FGM beam is modeled by an Euler-Bernoulli beam theory. It is assumed that beam is made of a mixture of metal and ceramic with properties varying through the thickness following a... 

The purpose of this paper is the enhancement of the AFM sensitivity through the selection of an optimized FGM micro cantilever beam. In this paper, resonant frequencies and sensitivities of first two modes of micro cantilever which is made of functionally graded materials are investigated and a relationship is developed to evaluate the sensitivity of FGM micro cantilever. Effect of volume fraction of materials and surface contact stiffness on the resonant frequencies and sensitivities are studied. The rectangular FGM beam is modeled by an Euler-Bernoulli beam theory. It is assumed that beam is made of a mixture of metal and ceramic with properties varying through the thickness following a... 

Improvement of microcantilever-based sensors and actuators chiefly depends on their modeling accuracy. Atomic force microscopy (AFM) is the most widespread application of microcantilever beam as a sensor, which is usually influenced by the tip-sample interaction force. Along this line of reasoning, vibration of AFM microcantilever probe is analyzed in this paper, along with analytical and experimental investigation of the influence of the sample interaction force on the microcantilever vibration. Nonlinear integropartial equation of microcantilever vibration subject to the tip-sample interaction is then derived and multiple time scales method is utilized to estimate the tip amplitude while... 

Improvement of microcantilever-based sensors and actuators chiefly depends on how comprehensively they are modeled and precisely formulated. Atomic Force Microscopy (AFM) is the most widespread application of microcantilever beam as a sensor, which is usually influenced by the tip-sample interaction force. For this, vibration of AFM microcantilever probe is analyzed in this paper, along with analytical, numerical and experimental investigation of the influence of the sample interaction force on the microcantilever vibration. Nonlinear integro-partial equation of microcantilever vibration subject to the tip-sample interaction is then derived and numerically simulated. Moreover, multiple time... 

A viscoelastic microcantilever beam is analytically analyzed based on the modified strain gradient theory. Kelvin-Voigt scheme is used to model beam viscoelasticity. By applying Euler-Bernoulli inextensibility of the centerline condition based on Hamilton's principle, the nonlinear equation of motion and the related boundary conditions are derived from shortening effect theory and discretized by Galerkin method. Inner damping, nonlinear curvature effect, and nonlinear inertia terms are also taken into account. In the present study, the generalized derived formulation allows modeling any nonlinear combination such as nonlinear terms that arise due to inertia, damping, and stiffness, as well... 

Despite their simple structure and design, microcantilevers are receiving increased attention due to their unique sensing and actuation features in many MEMS and NEMS. Along this line, a non-linear distributed-parameters modeling of a microcantilever beam under the influence of a nanoparticle sample is studied in this paper. A long-range Van der Waals force model is utilized to describe the microcantilever-particle interaction along with an inextensibility condition for the microcantilever in order to derive the equations of motion in terms of only one generalized coordinate. Both of these considerations impose strong nonlinearities on the resultant integro-partial equations of motion. In...