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micromachining
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Fabrication of a novel six DOF thermal nanopositioner by using bulk micromachining process
, Article 2011 IEEE International Conference on Mechatronics, ICM 2011 - Proceedings, 13 April 2011 through 15 April 2011 ; April , 2011 , Pages 702-707 ; 9781612849836 (ISBN) ; Pourzand, H ; Alasty, A ; Akrami, S. M. R ; Sharif University of Technology
Abstract
In this paper, a novel microfabrication process of a six DOF thermal compliant nanopositioner is presented. The microfabrication process was based on bulk micromachining process. By using this process some important operational restrictions which are usually created by surface micromachining were removed. Moreover, this novel process does not need SOI wafers and needs only ordinary wafers. Therefore, it makes microfabrication process cheaper than surface micromachining processes where SOI wafer should be used. This method is completely appropriate for microactuators which have 120 degree misalignment. Finally, a primary test by using interferometer method was used to test connection of...
Design, simulation and fabrication of a MEMS accelerometer by using sequential and pulsed-mode DRIE processes
, Article Journal of Micromechanics and Microengineering ; Volume 27, Issue 1 , 2017 ; 09601317 (ISSN) ; Jafari, K ; Gharooni, M ; Sharif University of Technology
Institute of Physics Publishing
2017
Abstract
A sensitive half-bridge MEMS accelerometer fabricated by sequential and pulsed-mode processes is presented in this paper. The proposed accelerometer is analyzed by using conventional equations and the finite element method. The micromachining technology used in this work relies on two processes: sequential and pulsed-mode. In the sequential deep reactive ion etching process, a mixture of hydrogen and oxygen with a trace value of SF6 is used instead of polymeric material in the passivation step. The pulsed-mode process employs periodic hydrogen pulses in continuous fluorine plasma. Because of the continuous nature of this process, plus the in situ passivation caused by the hydrogen pulses,...
Fabrication of a novel six DOF thermal nanopositioner by using bulk micromachining process
, Article IEEE International Conference on Mechatronics, ICM 2011 - Proceedings ; 2011 , pp. 702-707 ; ISBN: 9781612849836 ; Pourzand, H ; Alasty, A ; Akrami, S .M. R ; Sharif University of Technology
Abstract
In this paper, a novel microfabrication process of a six DOF thermal compliant nanopositioner is presented. The microfabrication process was based on bulk micromachining process. By using this process some important operational restrictions which are usually created by surface micromachining were removed. Moreover, this novel process does not need SOI wafers and needs only ordinary wafers. Therefore, it makes microfabrication process cheaper than surface micromachining processes where SOI wafer should be used. This method is completely appropriate for microactuators which have 120 degree misalignment. Finally, a primary test by using interferometer method was used to test connection of...
Manufacturing of multi-functional micro parts by two-component metal injection moulding
, Article International Journal of Advanced Manufacturing Technology ; Volume 33, Issue 1-2 , 2007 , Pages 176-186 ; 02683768 (ISSN) ; Rota, A ; Petzoldt, F ; Simchi, A ; Sharif University of Technology
2007
Abstract
Several metals and alloys can be used to enhance the mechanical and physical properties of micro parts and components for micromechanical, micro-chemical or sensor applications. Such parts can be produced in series by the powder metallurgical process of micro metal injection moulding (μ-MIM). This paper describes a novel manufacturing route for metallic multi-material micro components, two-component micro metal injection moulding (2C-μ-MIM). Similar to "two-colour" injection moulding of plastics, the process allows the integration of multiple functions in a micro part by simultaneously injecting and joining two materials in one mould. Net-shape parts with solid material interfaces are...
Numerical Simulation and Analysis of Micro Nanoelectrodeposition
,
M.Sc. Thesis
Sharif University of Technology
;
Saeedi, Mohammad Saeed
(Supervisor)
;
Kazemzade Hanani, Siamak
(Supervisor)
Abstract
Nowadays, nanotechnology has emerged in many processes; hence the construction of this scale is also important. By reducing the size of equipment, raw material consumption is reduced and less space is needed for equipment. In addition it is economical. LIGA method has the potential to make parts with small dimensions and accurate tolerances, that it is impossible with other methods (chemical vapor deposition, physical vapor deposition, bulk micromachining, surface Machining). It is possible to assemble the pieces by producing micro-molding in LIGA procedure.In this thesis, numerical simulation of electrodeposition that is one of the main steps in the LIGA procedure has been investigated. One...
A novel 3-dimentional ultra high precision positioning platform for micro machining cutting tools
, Article 3rd International Conference on Control, Automation and Robotics, ICCAR 2017, 22 April 2017 through 24 April 2017 ; 2017 , Pages 284-288 ; 9781509060870 (ISBN) ; Yadegari, A ; Rashidi, D ; Sharif University of Technology
Institute of Electrical and Electronics Engineers Inc
2017
Abstract
Ultra-high precision machining is proposed by externally actuating the work piece in linear motions in the X-Y plane and linear motion in the Z-axis. To solve the problems in the machining process such as nonlinearity and low repeatability positioning accuracy of machining tools in a larger scale, a novel platform for cutting tools in micro machining based on electrostatic linear micromotors and piezoelectric stack actuator system is presented. © 2017 IEEE
Investigation of the effects of process damping on chatter instability in micro end milling
, Article Procedia CIRP ; Volume 1, Issue 1 , 2012 , Pages 156-161 ; 22128271 (ISSN) ; Movahhedy, M. R ; Akbari, J ; Sharif University of Technology
2012
Abstract
In this paper, chatter instability of micro end mill tools is studied by taking into account the process damping effect. The actual geometry of the micro tool including shank, taper part and fluted section is considered in the analysis. Timoshenko beam theory is utilized to consider the shear deformation and rotary inertia effects due to short and thick beam-type structures of each parts of the micro tool. The extended Hamilton's Principle is used to formulate a detailed dynamical model of the rotating micro end mill. The governing equations are solved by assumed mode model expansion. An exact dynamic stiffness method is developed to investigate modal characteristics of the tool including...
Finite-element analysis of platinum-based cone microelectrodes for implantable neural recording
, Article 2009 4th International IEEE/EMBS Conference on Neural Engineering, NER '09, Antalya, 29 April 2009 through 2 May 2009 ; 2009 , Pages 395-398 ; 9781424420735 (ISBN) ; Frounchi, J ; Jahed, N ; Tinati, M. A ; National Institutes of Health, NIH; National Institute of Neurological Disorders and Stroke, NINDS; National Science Foundation, NSF ; Sharif University of Technology
2009
Abstract
There have been significant advances in fabrication of high-density microelectrode arrays using silicon micromachining technology in neural signal recording systems. The interface between microelectrodes and chemical environment brings great interest to researchers working on extracellular stimulation. This interface is quite complex and must be modeled carefully to match experimental results. Computer simulation is a method to increase the knowledge about these arrays and to this end the finite element method provides a strong environment for investigation of relative changes of the electrical field extension surrounding an electrode positioned in chemical environment. In this paper FEM...