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polymeric-thermal-microactuator
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Design, Fabrication and Control of a novel Polymeric Thermal Microactuator
, M.Sc. Thesis Sharif University of Technology ; Alasty, Aria (Supervisor) ; Salarieh, Hassan (Supervisor)
Abstract
Systems composed of electrical and mechanical elements in micrometer scale are called microelectromechanical systems which are commonly fabricated on silicon substrates. These systems are in connection with environment by the means of sensors and actuators. Thermal microactuators as one of the most applicable actuators produce force and displacement on the basis of thermal expansion.Recently, by the advent of some polymers compatible with microfabrication methods such as SU8 and due to their remarkable thermal properties,polymeric thermal microactuators are attracting more attention in a way that polymeric type of almost every predesigned thermal microactuators are fabricated and much...