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Article Journal of Materials Science: Materials in Electronics ; Volume 30, Issue 24 , 2019 , Pages 21185-21198 ; 09574522 (ISSN) ; Alam, M. H ; Dastan, D ; Ziakhodadadian, S ; Shi, Z ; Garmestani, H ; Weidenbach, A. S ; Ţălu, Ş ; Sharif University of Technology
Experimental parameters have direct influences on materials properties and therefore their applications. The effect of plasma power on the properties of cobalt oxide thin films, prepared using plasma-enhanced chemical vapor deposition technique, on stainless steel substrates have been addressed in this paper. The structural, morphological, and compositional properties of these films were investigated by means of X-ray diffraction (XRD), atomic force microscopy (AFM), and X-ray photoelectron spectroscopy (XPS) technique. The XRD patterns demonstrated the growth of polycrystalline Co3O4 thin film with a cubic spinel structure such that the intensity of (511) and (311) peaks increase as the...