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pull-in--pi--deflection
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A numerical procedure for obtaining the static and pull-in deflection and voltage of capacitive microcantilever beams
, Article 8th Biennial ASME Conference on Engineering Systems Design and Analysis, ESDA2006, Torino, 4 July 2006 through 7 July 2006 ; Volume 2006 , 2006 ; 0791837793 (ISBN); 9780791837795 (ISBN) ; Alasty, A ; Sharif University of Technology
2006
Abstract
A numerical procedure is proposed for obtaining the static deflection, pull-in (PI) deflection and PI voltage of electrostatically excited capacitive microcantilever beams. The method is not time and memory consuming as Finite Element Analysis (FEA). Nonlinear ordinary differential equation of the static deflection of the beam is derived, w/wo considering the fringing field effects. The nondimensional parameters upon which PI voltage is dependent are then found. Thereafter, using the parameters and the numerical method, three closed form equations for pull-in voltage are developed. The results are in good agreement with others in literature. Copyright © 2006 by ASME