Sharif Digital Repository

Planar grating diffraction analysis based on Legendre expansion of electromagnetic fields is reported. In contrast to conventional RCWA in which the solution is obtained using state variables representation of the coupled wave amplitudes; here, the solution is expanded in terms of Legendre polynomials. This approach, without facing the problem of numerical instability and inevitable round off errors, yields well-behaved algebraic equations for deriving diffraction efficiencies, and can be employed for analysis of different types of gratings. Thanks to the recursive properties of Legendre polynomials, for longitudinally inhomogeneous gratings, wherein differential equations with non-constant...