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Development of nanocrystalline TiO2-Er2O3 and TiO2-Ta2O5 thin film gas sensors: Controlling the physical and sensing properties
, Article Sensors and Actuators, B: Chemical ; Volume 141, Issue 1 , 2009 , Pages 76-84 ; 09254005 (ISSN) ; Fray, D. J ; Sharif University of Technology
2009
Abstract
A systematic comparison of single and binary metal oxide TiO2, TiO2-Er2O3 and TiO2-Ta2O5 thin film gas sensors with nanocrystalline and mesoporous microstructure, prepared by sol-gel route, was conducted. The gas sensitivity was increased by secondary phase introduction into TiO2 film via two mechanisms, firstly due to the inhibition of anatase-to-rutile transformation, since the anatase phase accommodates larger amounts of adsorbed oxygen, and secondly due to the retardation of grain growth, since the higher surface area provides more active sites for gas molecule adsorption. The binary metal oxide gas sensors exhibited a remarkable response towards low concentrations of CO and NO2 gases at...