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rf-sputtering-and-rf-pecvd
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Fabrication localized surface plasmon resonance sensor chip of gold nanoparticles and detection lipase-osmolytes interaction
, Article Applied Surface Science ; Vol. 314, issue , 2014 , Pages 138-144 ; ISSN: 01694332 ; Hoornam, S ; Vesaghi, M. A ; Ranjbar, B ; Azizi, A ; Mobasheri, H ; Sharif University of Technology
Abstract
Co-deposition of RF-sputtering and RF-PECVD from acetylene gas and Au target were used to prepare sensor chip of gold nanoparticles (Au NPs). Deposition conditions were optimized to reach a Localized Surface Plasmon Resonance (LSPR) sensor chip of Au NPs with particle size less than 10 nm. The RF power was set at 180 W and the initial gas pressure was set at 0.035 mbar. Transmission Electron Microscopy (TEM) images and Atomic Force Microscopy (AFM) data were used to investigate particles size and surface morphology of LSPR sensor chip. The Au and C content of the LSPR sensor chip of Au NPs was obtained from X-ray photoelectron spectroscopy (XPS). The hydrogenated amorphous carbon (a-C:H)...