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Oxidation effects on transport characteristics of nanoscale MOS capacitors with an embedded layer of silicon nanocrystals obtained by low energy ion implantation
, Article Materials Science and Engineering B: Solid-State Materials for Advanced Technology ; Volume 124-125, Issue SUPPL , 2005 , Pages 494-498 ; 09215107 (ISSN) ; Shalchian, M ; Benassayag, G ; Coffin, H ; Bonafos, C ; Schamm, S ; Atarodi, S. M ; Claverie, A ; Sharif University of Technology
2005
Abstract
In this paper, we have studied the effect of annealing under slightly oxidizing ambient (N2 + O2) on the structural and electrical characteristics of a limited number of silicon nanoparticles embedded in an ultra-thin SiO2 layer. These nanoparticles were synthesized by ultra-low energy (1 keV) ion implantation and annealing. Material characterization techniques including transmission electron microscopy (TEM), Fresnel imaging and spatially resolved electron energy loss spectroscopy (EELS) have been used to evaluate the effects of oxidation on structural characteristics of nanocrystal layer. Electrical transport characteristics have been measured on less than one hundred nanoparticles by...
Optical and electrical properties of the copper-carbon nanocomposites
, Article Nanophotonics II, Strasbourg, 7 April 2008 through 9 April 2008 ; Volume 6988 , 2008 ; 0277786X (ISSN); 9780819471864 (ISBN) ; Vesaghi, M. A ; Shafiekhani, A ; Ahmadi, M ; Sharif University of Technology
2008
Abstract
We prepared copper-carbon nanocomposite films by co-deposition of RF-Sputtering and RF-PECVD methods at room temperature. These films contain different copper concentration and different size of copper nanoparticles. The copper content of these films was obtained from Rutherford Back Scattering (RBS) analyze. We studied electrical resistivity of samples versus copper content. A metal-nonmetal transition was observed by decreasing of copper content in these films. The electrical conductivity of dielectric and metallic samples was explained by tunneling and percolation models respectively. In the percolation threshold conduction results from two mechanisms: percolation and tunneling. In the...