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Design and fabrication of a micro-opto-mechanical-systems accelerometer based on intensity modulation of light fabricated by a modified deep-reactive-ion-etching process using silicon-on-insulator wafer
, Article Journal of Vacuum Science and Technology B ; Volume 40, Issue 4 , 2022 ; 21662746 (ISSN) ; Gharooni, M ; Salarieh, H ; Akbari, J ; Sharif University of Technology
AVS Science and Technology Society
2022
Abstract
Accelerometers that work based on intensity modulation of light are more sensitive, economically feasible, and have a simpler fabrication process compared to wavelength modulation. A micro-opto-electro-mechanical-system accelerometer based on intensity modulation of light is designed and fabricated. A movable shutter that is attached to the proof mass is designed to change the intensity of light. Moreover, the mechanical part is designed to improve the overall sensitivity and linear behavior in the measurement range. The designed accelerometer is fabricated by a deep-reactive-ion-etching (DRIE) process. The DRIE process used in this report is based on a Bosch-like process, which uses SF 6...