Sharif Digital Repository

During recent years, many investigations have been carried out to determine how to select different materials for the making of Micro Electro Mechanical Systems (MEMS) and bio-MEMS. The NiTi shape memory alloy thin film has been much regarded as a promising candidate for MEMS due. to its unique shape memory effect and high energy output. In this research, NiTi thin film was fabricated using a sputtering technique from separate elemental Ni and Ti targets. The characterizations of the deposited films were, investigated using different analysis techniques, such as Field Emission SEM, DSC, XR.D, electrical resistivity measurement and nanoindentation. © Sharif University of Technology, June 2009... 

In this study, UV‐Vis-NIR photodetectors based on decorated ZnO nanofibers (NFs) with optimized coverage of Au nanoparticles (NPs) fabricated via combined simple electrospinning and sputtering techniques are introduced. The effect of different coverages of Au NPs resulted from different Au nominal layer thicknesses on the morphology and optical properties of the ZnO fibers are investigated through various characterization methods. It is discovered that 4 nm Au nominal thickness provides the highest UV on/off ratio (~460), responsivity (~332 A/W), detectivity (~2.93×10 11 Jones) as well as faster rise and decay times as compared to pure ZnO nanofibers. A broad spectral response from UV to NIR... 

This study aims at investigating the effect of the substrate material on growth mechanism and also microstructure of Ta2O5 thin films. For this purpose, atomic force microscopy, scanning electron microscopy, and interferometry analyses were implemented to reveal the influence of silicon wafer and amorphous BK7 glass substrates on the nucleation and growth mechanisms of Ta2O5 thin films deposited via the radio frequency magnetron sputtering technique. Results indicated that those films with finer morphologies had relatively higher nucleation densities. Compared with BK7 glass substrate, crystals formed on the silicon wafer were shown to be finer and had lower mean areas in more nucleation... 

In this work, we compared formation and properties of heat-treated Ag nanoparticles in silica matrix synthesized by RF- reactive magnetron cosputtering and sol-gel methods separately. The sol-gel and sputtered films were annealed at different temperatures in air and in a reduced environment, respectively. The optical UV-visible Spectrophotometry have shown that the absorption peak appears at 456 and 400 nm wavelength indicating formation of silver nanoparticles in SiO2 matrix for both the sol -gel and sputtering methods at 100 and 800 °C, respectively. XPS measurements showed that the metallic Ag0 nanoparticles can be obtained from both the techniques at these temperatures. According to XPS...