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Fabrication of a novel six DOF thermal nanopositioner by using bulk micromachining process
, Article IEEE International Conference on Mechatronics, ICM 2011 - Proceedings ; 2011 , pp. 702-707 ; ISBN: 9781612849836 ; Pourzand, H ; Alasty, A ; Akrami, S .M. R ; Sharif University of Technology
Abstract
In this paper, a novel microfabrication process of a six DOF thermal compliant nanopositioner is presented. The microfabrication process was based on bulk micromachining process. By using this process some important operational restrictions which are usually created by surface micromachining were removed. Moreover, this novel process does not need SOI wafers and needs only ordinary wafers. Therefore, it makes microfabrication process cheaper than surface micromachining processes where SOI wafer should be used. This method is completely appropriate for microactuators which have 120 degree misalignment. Finally, a primary test by using interferometer method was used to test connection of...
Fabrication of a novel six DOF thermal nanopositioner by using bulk micromachining process
, Article 2011 IEEE International Conference on Mechatronics, ICM 2011 - Proceedings, 13 April 2011 through 15 April 2011 ; April , 2011 , Pages 702-707 ; 9781612849836 (ISBN) ; Pourzand, H ; Alasty, A ; Akrami, S. M. R ; Sharif University of Technology
Abstract
In this paper, a novel microfabrication process of a six DOF thermal compliant nanopositioner is presented. The microfabrication process was based on bulk micromachining process. By using this process some important operational restrictions which are usually created by surface micromachining were removed. Moreover, this novel process does not need SOI wafers and needs only ordinary wafers. Therefore, it makes microfabrication process cheaper than surface micromachining processes where SOI wafer should be used. This method is completely appropriate for microactuators which have 120 degree misalignment. Finally, a primary test by using interferometer method was used to test connection of...
Numerical Simulation and Analysis of Micro Nanoelectrodeposition
,
M.Sc. Thesis
Sharif University of Technology
;
Saeedi, Mohammad Saeed
(Supervisor)
;
Kazemzade Hanani, Siamak
(Supervisor)
Abstract
Nowadays, nanotechnology has emerged in many processes; hence the construction of this scale is also important. By reducing the size of equipment, raw material consumption is reduced and less space is needed for equipment. In addition it is economical. LIGA method has the potential to make parts with small dimensions and accurate tolerances, that it is impossible with other methods (chemical vapor deposition, physical vapor deposition, bulk micromachining, surface Machining). It is possible to assemble the pieces by producing micro-molding in LIGA procedure.In this thesis, numerical simulation of electrodeposition that is one of the main steps in the LIGA procedure has been investigated. One...