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Development, modeling and deflection analysis of hybrid micro actuator with integrated thermal and piezoelectric actuation
, Article Meccanica ; Volume 48, Issue 5 , 2013 , Pages 1081-1091 ; 00256455 (ISSN) ; Zohoor, H ; Kargarnovin, M. H ; Sharif University of Technology
2013
Abstract
Micro actuators are irreplaceable part of motion control in minimized systems. The current study presents an analytical model for a new Hybrid Thermo Piezoelectric micro actuator based on the combination of piezoelectric and thermal actuation mechanisms. The micro actuator structure is a double PZT cantilever beam consisting of two arms with different lengths. The presented micro actuator uses the structure of electrothermal micro actuator in which polysilicon material is replaced by PZT. Also the voltage and poling directions are considered in the lengthwise of PZT beams. As a result, the piezoelectric actuation mechanism is based on d33 strain coefficient. The tip deflection of micro...