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    Effects of tool rake angle and tool nose radius on surface quality of ultraprecision diamond-turned porous silicon

    , Article Journal of Manufacturing Processes ; Volume 37 , 2019 , Pages 321-331 ; 15266125 (ISSN) Heidari, M ; Akbari, J ; Yan, J ; Sharif University of Technology
    Elsevier Ltd  2019
    Abstract
    This paper presents an investigation of the effects of tool rake angle and nose radius on the surface quality of ultraprecision diamond-turned porous silicon. The results showed that as rake angle decreases, the high-stress field induced by the tool edge increases, causing microcracks to propagate extensively near the pore walls. As a result, the ductile-machined areas shrank under a negative tool rake angle. On the other hand, brittle fracture occurred around pores released cutting pressure significantly. These trends of rake angle effects are distinctly different from those in the cutting of non-porous silicon. Finite element simulation of stress in the cutting area agreed with the... 

    Effects of tool rake angle and tool nose radius on surface quality of ultraprecision diamond-turned porous silicon

    , Article Journal of Manufacturing Processes ; Volume 37 , 2019 , Pages 321-331 ; 15266125 (ISSN) Heidari, M ; Akbari, J ; Yan, J ; Sharif University of Technology
    Elsevier Ltd  2019
    Abstract
    This paper presents an investigation of the effects of tool rake angle and nose radius on the surface quality of ultraprecision diamond-turned porous silicon. The results showed that as rake angle decreases, the high-stress field induced by the tool edge increases, causing microcracks to propagate extensively near the pore walls. As a result, the ductile-machined areas shrank under a negative tool rake angle. On the other hand, brittle fracture occurred around pores released cutting pressure significantly. These trends of rake angle effects are distinctly different from those in the cutting of non-porous silicon. Finite element simulation of stress in the cutting area agreed with the...