Sharif Digital Repository

Three-dimensional vectorial diffraction analysis of gratings is presented based on Legendre polynomial expansion of electromagnetic fields. In contrast to conventional rigorous coupled wave analysis (RCWA) in which the solution is obtained using state variables representation of the coupled wave amplitudes, here the solution of first-order coupled Maxwell's equations is expanded in terms of Legendre polynomials, where Maxwell's equations are analytically projected in the Hilbert space spanned by Legendre polynomials. This approach yields well-behaved algebraic equations for deriving diffraction efficiencies and electromagnetic field profiles without facing the problem of numerical...