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Oscillatory behavior of the nonlinear clamped-free beam microgyroscopes under electrostatic actuation and detection
, Article ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) ; Volume 10 , 2013 ; 9780791856390 (ISBN) ; Firoozbakhsh, K ; Ahmadian, M. T ; Barari, A ; ASME ; Sharif University of Technology
American Society of Mechanical Engineers (ASME)
2013
Abstract
Vibratory micromachined gyroscopes use suspending mechanical parts to measure rotation. They have no gyratory component that require bearings, and for this reason they can be easily miniaturized and batch production using micromachining methods. They operate based on the energy interchange between two modes of structural vibration. The objective of this paper is to study the oscillatory behavior of an electrostatically actuated vibrating microcantilever gyroscope with proof mass at its end. In the modelling, the effects of different nonlinearities, fringing field and base rotation are considered. The microgyroscope is subjected to coupled bending oscillations around the static deflection...