Design and Simulation (& Manufacturing) of A Micro-Gyroscope, M.Sc. Thesis Sharif University of Technology ; Akbari, Javad (Supervisor)
Abstract
Nowadays, microgyroscopes are among the most important products of MEMS. The production of small, precise and inexpensive gyroscopes has become possible as the result of recent developments in fabrication technology. In this thesis it is intended to introduce a new method for manufacturing more precise microgyroscopes regarding manufacture facilities. Using this new method, sensitivity and resistance of microgyroscopes are increased against noises which are primarily caused by vibration and rotation about undesirable axes. The rotational movement imposed on the gyro is detected through fluid flow within its torus channel. This transformation facilitates the measurement of the initial motion....
Cataloging briefDesign and Simulation (& Manufacturing) of A Micro-Gyroscope, M.Sc. Thesis Sharif University of Technology ; Akbari, Javad (Supervisor)
Abstract
Nowadays, microgyroscopes are among the most important products of MEMS. The production of small, precise and inexpensive gyroscopes has become possible as the result of recent developments in fabrication technology. In this thesis it is intended to introduce a new method for manufacturing more precise microgyroscopes regarding manufacture facilities. Using this new method, sensitivity and resistance of microgyroscopes are increased against noises which are primarily caused by vibration and rotation about undesirable axes. The rotational movement imposed on the gyro is detected through fluid flow within its torus channel. This transformation facilitates the measurement of the initial motion....
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