Fabrication and Characterization of Methanol and Hydrogen Sensors Based on Porous Silicon, Ph.D. Dissertation Sharif University of Technology ; Iraji Zad, Azam (Supervisor)
Abstract
We studied porous silicon as a resistive gas sensor at room temperature. Meso- and macro- porous silicon were formed by electrochemical etching of single crystal silicon wafers in different conditions. For Meso porous Si we used p+-type wafers as substrate and for macro porous Si formation n- and p-type wafers were used. The mechanism of methanol vapor sensing was studied by Scanning tunneling spectroscopy and Fourier transform infrared spectroscopy. The results showed that methanol increases partial oxidation of surface and causes increase of defect density. These defects play important role to trap electrons and create “acceptor surface states”. These acceptor surface states in p+-type...
Cataloging briefFabrication and Characterization of Methanol and Hydrogen Sensors Based on Porous Silicon, Ph.D. Dissertation Sharif University of Technology ; Iraji Zad, Azam (Supervisor)
Abstract
We studied porous silicon as a resistive gas sensor at room temperature. Meso- and macro- porous silicon were formed by electrochemical etching of single crystal silicon wafers in different conditions. For Meso porous Si we used p+-type wafers as substrate and for macro porous Si formation n- and p-type wafers were used. The mechanism of methanol vapor sensing was studied by Scanning tunneling spectroscopy and Fourier transform infrared spectroscopy. The results showed that methanol increases partial oxidation of surface and causes increase of defect density. These defects play important role to trap electrons and create “acceptor surface states”. These acceptor surface states in p+-type...
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