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- Type of Document: M.Sc. Thesis
- Language: English
- Document No: 40886 (58)
- University: Sharif University of Technology, International Campus, Kish Island
- Department: Science and Engineering
- Advisor(s): Alasty, Areya
- Abstract:
- Currently, precision positioning plays a pivotal role in technology. The need for accurate positioning in applications such as robotics, optoelectronics and micro and nano technology increases day by day. To begin with, we wanted to make a miniature prototype of a micro actuator but in this regard, we are faced with several problems. Some major problems were the high cost of this prototype plus the fact that we did not have the necessary equipment with acceptable resolution for making such a system, so we decided to decrease the scale and build it in micro scale which is accessible for us. The main idea and design of this micro actuator is by Mrs. Akbari. During this project, the researcher analyzed and fabricated monolithic flexible mechanisms with precision in micro and nano scale. This micro / nano positioner can translate final platform in six degrees of freedom, which can be made with ordinary fabrication methods. In this project, we have a micro actuator with six degrees of freedom, which was analyzed by ANSYS software. There are many other similar researches but in comparison, our theoretical analyses have a higher efficiency. The 6 degrees of freedom positioning consists of 2 types DOF flexible joints and new especial designs of a micro actuator in 2 degrees of freedom. One of the flexible joints has rotational axes which cause out of plane displacement and the other one is based on the torque around Z axes and planar displacement are achieved. The new micro actuator it operated based on thermal strains that are based on voltage applying . It can move in 2 degrees of freedom and in 2 sides for every degree of freedom. These abilities are very important for increasing work range. In the fabrication phase, we made this mechanism in the Nano electronic at the University of Tehran laboratory and tested it with the collaboration of the Optoelectronics laboratory of Tabriz University and the Nano electronic laboratory at the University of Tehran. In the testing phase because of optics limitation we could not have accurate measurements. The only method to have a measurement is using diffraction phenomena. As it is obvious, in diffraction phenomena we have an image based on the structure .By moving the structure the image changes. By comparing the initial image and final image we can estimate the amount of displacement.
- Keywords:
- Silicones ; Optoelectronic Network ; Compliant Mechanism ; Micro Actuator ; Diffraction Phenomena
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