Fabrication of Metallic Nano-Tip Field Emitters and Measurement, M.Sc. Thesis Sharif University of Technology ; Rashidian, Bijan (Supervisor)
Abstract
The need for integration of electron guns together with thermal considerations of thermionic cathodes has led to design new cold cathode guns based on field emission phenomenon. In first part of this thesis, basic field emission theories, fabrication methods of field emitter arrays, effect of different parameters on the field emission properties of field emitter arrays and applications of these arrays are investigated. After setting up fabrication methods of nano-tip field emitters, in the second part of thesis, Si nano-tips and Si field emitter arrays are fabricated using of thermal oxidation of silicon substrate, lithography, and chemical etching of silicon oxide and silicon substrate. Si...
Cataloging briefFabrication of Metallic Nano-Tip Field Emitters and Measurement, M.Sc. Thesis Sharif University of Technology ; Rashidian, Bijan (Supervisor)
Abstract
The need for integration of electron guns together with thermal considerations of thermionic cathodes has led to design new cold cathode guns based on field emission phenomenon. In first part of this thesis, basic field emission theories, fabrication methods of field emitter arrays, effect of different parameters on the field emission properties of field emitter arrays and applications of these arrays are investigated. After setting up fabrication methods of nano-tip field emitters, in the second part of thesis, Si nano-tips and Si field emitter arrays are fabricated using of thermal oxidation of silicon substrate, lithography, and chemical etching of silicon oxide and silicon substrate. Si...
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