Deposition and Analysis of Indium-Tin-Oxide NanoStructures Using Sputtering, M.Sc. Thesis Sharif University of Technology ; Rashidian, Bijan (Supervisor)
Abstract
Transparent conductive materials have been widely used in semiconductor technology. Among them all, Indium tin oxide (ITO) has been utilized as electrodes in liquid crystal displays, solar cells, heat reflecting films and gas sensors.In general, the desired properties of transparent conductive oxides are high conductance and transmission. However, due to the complexity of ITO molecular structure, the film properties strongly depend on the depositon parameters.In first part of this thesis, physical properties and electrical characteristic of ITO films, different deposition techniques, and effects of deposition parameters (substrate temperature, pressure, power, etc. ) on film properties are...
Cataloging briefDeposition and Analysis of Indium-Tin-Oxide NanoStructures Using Sputtering, M.Sc. Thesis Sharif University of Technology ; Rashidian, Bijan (Supervisor)
Abstract
Transparent conductive materials have been widely used in semiconductor technology. Among them all, Indium tin oxide (ITO) has been utilized as electrodes in liquid crystal displays, solar cells, heat reflecting films and gas sensors.In general, the desired properties of transparent conductive oxides are high conductance and transmission. However, due to the complexity of ITO molecular structure, the film properties strongly depend on the depositon parameters.In first part of this thesis, physical properties and electrical characteristic of ITO films, different deposition techniques, and effects of deposition parameters (substrate temperature, pressure, power, etc. ) on film properties are...
Find in contentBookmark |
|