Analysis of the Interaction of Electron Beam and External Field by Considering Space Charge Effect and its Application in EBL Nanolithography, M.Sc. Thesis Sharif University of Technology ; Rashidian, Bizhan (Supervisor) ; Mehrani, Khashayar (Co-Advisor)
Abstract
Due to tremendous growth in usage of electron beams in different applications like VLSI, welding, chemical processes, Polymer industry and medical applications, precise study of these beams is of great importance. One of the most important parameters in studying electron beams characteristics is the phenomenon and effect of space charge. Although in most methods of analyzing electron optical systems, this effect is neglected, however in high density beams, this effect is bold. Space charge effect is due to interaction and electrostatic repulsion force between each of the electrons in the beam, which results in a change in shape and also divergence of beam. It is worth to mention that in...
Cataloging briefAnalysis of the Interaction of Electron Beam and External Field by Considering Space Charge Effect and its Application in EBL Nanolithography, M.Sc. Thesis Sharif University of Technology ; Rashidian, Bizhan (Supervisor) ; Mehrani, Khashayar (Co-Advisor)
Abstract
Due to tremendous growth in usage of electron beams in different applications like VLSI, welding, chemical processes, Polymer industry and medical applications, precise study of these beams is of great importance. One of the most important parameters in studying electron beams characteristics is the phenomenon and effect of space charge. Although in most methods of analyzing electron optical systems, this effect is neglected, however in high density beams, this effect is bold. Space charge effect is due to interaction and electrostatic repulsion force between each of the electrons in the beam, which results in a change in shape and also divergence of beam. It is worth to mention that in...
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