An Investigation on the Resonant, Frequency and Nonlinear Behavior of Atomic Force Microscope (AFM) Modeled on the Basis of the Nonlocal Theory, M.Sc. Thesis Sharif University of Technology ; Ahmadian, Mohammad Taghi (Supervisor) ; Mehdigholi, Hamid (Supervisor)
Abstract
Atomic force microscope (AFM) has a significant capability of imaging surface topography on an atomic scale. It is also widely used for Nanolithography in MEMS/NEMS (micro/nanoelectromechanical systems). Although the conventional AFMs have a significant capability of nano-scale surface measurements, their probe tips cannot come in close proximity to the sidewalls, no matter how sharp they are. Therefore, no accurate nano-scale measurements at sidewalls and edges can be achieved by these conventional AFMs. In addition, regarding the increasing applications of micro-structures such as micro nozzles, micro gears, micro holes and micro trenches which all of them have sidewalls and edges,...
Cataloging briefAn Investigation on the Resonant, Frequency and Nonlinear Behavior of Atomic Force Microscope (AFM) Modeled on the Basis of the Nonlocal Theory, M.Sc. Thesis Sharif University of Technology ; Ahmadian, Mohammad Taghi (Supervisor) ; Mehdigholi, Hamid (Supervisor)
Abstract
Atomic force microscope (AFM) has a significant capability of imaging surface topography on an atomic scale. It is also widely used for Nanolithography in MEMS/NEMS (micro/nanoelectromechanical systems). Although the conventional AFMs have a significant capability of nano-scale surface measurements, their probe tips cannot come in close proximity to the sidewalls, no matter how sharp they are. Therefore, no accurate nano-scale measurements at sidewalls and edges can be achieved by these conventional AFMs. In addition, regarding the increasing applications of micro-structures such as micro nozzles, micro gears, micro holes and micro trenches which all of them have sidewalls and edges,...
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