Fabrication of Silicon Nanowires with various Silicon Substrates and Investigation of the structural Properties and their Behavior<br/>

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Fabrication of Silicon Nanowires with various Silicon Substrates and Investigation of the structural Properties and their Behavior

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Type of Document: M.Sc. Thesis
Language: Farsi
Document No: 41389 (07)
University: Sharif University of Technology
Department: Materials and Sceince Engineering
Advisor(s): Askari, Masoud
Abstract:
In this thesis, Silicon nanowires were synthesized using carbothermal method via Vapor-Liquid-Solid mechanism catalyzed by gold nanoparticles deposited on various substrates. Silicon nanowires just grew on (100) and (111)-oriented silicon substrates. For a particular set of process parameters, we observed a critical thickness of the nucleating gold ﬁlm, that had depened on a kind of various substrates. We studied the dependence of the Au-Si alloy droplet size and size distribution on the starting gold ﬁlm thickness and the annealing conditions. We used a modiﬁed heating sequence that deconvoluted the effect of various substrates consumption and gas-phase silicon supply on the Au-Si alloy formation and allowed growth of nanowires with diameters between 30-90 nm. The modiﬁed heating sequence was also used to demonstrate the growth of bridging silicon nanowires
Keywords:
Silicon Nanowire ; Various Substrates ; Gold Deposition ; Vapor-Liquide-Solid Process

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