Sensitivity Analysis and Optimal Control of a Nano-Newton CMOS-MEMS Capacitive Force Sensor for Biomedical Applications, M.Sc. Thesis Sharif University of Technology ; Meghdari, Ali (Supervisor) ; Selk Ghafari, Ali (Supervisor)
Abstract
In the first part of the thesis, we introduce the structure of a Nano-Newton CMOS-MEMS capacitive force sensor. This force sensor has been utilized out-of-plane sensing mechanism with high accuracy and reliability. Also, we discuss about sensitivity analysis of this force sensor. The largest change of capacitance (increased capacitance + decreased capacitance) occurs in ℓ=2/3. Sensitivity for increased capacitance grows by 8.33% and for decreased capacitance grows by 2.27%. The proposed method provides useful guidelines to increase the sensitivity of the sensor up to 250%. In the second part, a fixed structure controller, PID type, is proposed to control and suppress the in-plane vibration...
Cataloging briefSensitivity Analysis and Optimal Control of a Nano-Newton CMOS-MEMS Capacitive Force Sensor for Biomedical Applications, M.Sc. Thesis Sharif University of Technology ; Meghdari, Ali (Supervisor) ; Selk Ghafari, Ali (Supervisor)
Abstract
In the first part of the thesis, we introduce the structure of a Nano-Newton CMOS-MEMS capacitive force sensor. This force sensor has been utilized out-of-plane sensing mechanism with high accuracy and reliability. Also, we discuss about sensitivity analysis of this force sensor. The largest change of capacitance (increased capacitance + decreased capacitance) occurs in ℓ=2/3. Sensitivity for increased capacitance grows by 8.33% and for decreased capacitance grows by 2.27%. The proposed method provides useful guidelines to increase the sensitivity of the sensor up to 250%. In the second part, a fixed structure controller, PID type, is proposed to control and suppress the in-plane vibration...
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