Possiblity and Implementation of Closed Loop Controller to Control a 2-DOF Electrostatic Torsional Micro-mirror, M.Sc. Thesis Sharif University of Technology ; Alasti, Aria (Supervisor) ; Salarieh, Hassan (Supervisor)
Abstract
Nowadays, Specific applications of micro-mirrors in MEMS industry as actuartors have been found. In optical networks, these instruments are used to transfer data between optical fibers as an optical switch. According to the high desired precision for the relevant applications, many different aspects should be considered in controlling of these systems. Some of these criteria include: high speed response, overshoot elimination, minimal energy consumption by regulating the system inputs, minimal vibration, consideration of system uncertainities and some unmeasurable state variable, and system rubostness against environmental disturbances. In this research by addressing all of these...
Cataloging briefPossiblity and Implementation of Closed Loop Controller to Control a 2-DOF Electrostatic Torsional Micro-mirror, M.Sc. Thesis Sharif University of Technology ; Alasti, Aria (Supervisor) ; Salarieh, Hassan (Supervisor)
Abstract
Nowadays, Specific applications of micro-mirrors in MEMS industry as actuartors have been found. In optical networks, these instruments are used to transfer data between optical fibers as an optical switch. According to the high desired precision for the relevant applications, many different aspects should be considered in controlling of these systems. Some of these criteria include: high speed response, overshoot elimination, minimal energy consumption by regulating the system inputs, minimal vibration, consideration of system uncertainities and some unmeasurable state variable, and system rubostness against environmental disturbances. In this research by addressing all of these...
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