Fabrication and Investigation of Silicon Based Nanostructures Surface Properties, M.Sc. Thesis Sharif University of Technology ; Rashidian, Bijan (Supervisor)
Abstract
Nowadays, silicon based devices especially carbon nanotubes received lots of attentions and advancement from researchers and industries. Because of amazing electrical and mechanical properties and wide range of applications, CNTs are received a lot of attention from nanoelectronics experts. There are lots of CNT growth methods such as: Arc Discharge, Laser Ablation, Surface Decomposition, CVD and PECVD.
In this thesis, we are going to use PECVD method to synthesis CNT. A typical PECVD system includes two parallel electrodes that have been packed in vacuum chamber and gases like argon, hydrogen and NH3 are introduced to chamber as a reactant gas. In this thesis, firs we had fixed... Cataloging briefFabrication and Investigation of Silicon Based Nanostructures Surface Properties, M.Sc. Thesis Sharif University of Technology ; Rashidian, Bijan (Supervisor)
Abstract
Nowadays, silicon based devices especially carbon nanotubes received lots of attentions and advancement from researchers and industries. Because of amazing electrical and mechanical properties and wide range of applications, CNTs are received a lot of attention from nanoelectronics experts. There are lots of CNT growth methods such as: Arc Discharge, Laser Ablation, Surface Decomposition, CVD and PECVD.
In this thesis, we are going to use PECVD method to synthesis CNT. A typical PECVD system includes two parallel electrodes that have been packed in vacuum chamber and gases like argon, hydrogen and NH3 are introduced to chamber as a reactant gas. In this thesis, firs we had fixed... Find in contentBookmark |
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