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Investigation On Microstructure And Properties Of Barium Strontium Titanate Thin Films Grown By Pulsed Laser Deposition

Saroukhani, Zahra | 2013

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 45404 (07)
  4. University: Sharif University of Technology
  5. Department: Materials Science and Engineering
  6. Advisor(s): Nemati, Ali; Mahdavi, Mohammad
  7. Abstract:
  8. Barium Strontium Titanate (BST) thin films are a promising candidate for dielectric capacitors due to their excellent ferroelectric properties. It is well known that BST has a high dielectric constant, low loss tangent, low leakage current and low Curie temperature. Pulse laser deposition (PLD) has been used extensively as it can maintain the stoichiometry of the target in the deposited film and also has high coverage ability, which both are important in capacitors. In this paper, Ba0.6Sr0.4TiO3 (BST) thin film has been deposited on the SiO2/Si substrate by pulsed laser deposition technique. The effect of post-annealed temperature, oxygen pressure deposition ambience and number of pulses on the film were investigated by using XPS, XRD, AFM and SEM analysis to obtain the optimal parameter for electrical properties. Results revealed that 720 °C is a good post-annealed temperature for BST thin film due to decrease on oxygen vacancies, strong crystalline peaks and Stability of layer composition. the deposited film at 100 mTorr oxygen pressure is appropriate due to less strain quantity and low roughness (3.6 nm). as well as increasing thickness of thin film lead to increase in crystallinity and roughness. In addition, efficacy of mentioned parameters (post-annealed temperature,oxygen pressure deposition ambience and number of pulses) on optical properties was investigated
  9. Keywords:
  10. Pulsed Laser Deposition (PLD) ; Thin Films ; Barium Strontium Titanate ; Ferroelectric

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