Investigation On Microstructure And Properties Of Barium Strontium Titanate Thin Films Grown By Pulsed Laser Deposition, M.Sc. Thesis Sharif University of Technology ; Nemati, Ali (Supervisor) ; Mahdavi, Mohammad (Supervisor)
Abstract
Barium Strontium Titanate (BST) thin films are a promising candidate for dielectric capacitors due to their excellent ferroelectric properties. It is well known that BST has a high dielectric constant, low loss tangent, low leakage current and low Curie temperature. Pulse laser deposition (PLD) has been used extensively as it can maintain the stoichiometry of the target in the deposited film and also has high coverage ability, which both are important in capacitors. In this paper, Ba0.6Sr0.4TiO3 (BST) thin film has been deposited on the SiO2/Si substrate by pulsed laser deposition technique. The effect of post-annealed temperature, oxygen pressure deposition ambience and number of pulses on...
Cataloging briefInvestigation On Microstructure And Properties Of Barium Strontium Titanate Thin Films Grown By Pulsed Laser Deposition, M.Sc. Thesis Sharif University of Technology ; Nemati, Ali (Supervisor) ; Mahdavi, Mohammad (Supervisor)
Abstract
Barium Strontium Titanate (BST) thin films are a promising candidate for dielectric capacitors due to their excellent ferroelectric properties. It is well known that BST has a high dielectric constant, low loss tangent, low leakage current and low Curie temperature. Pulse laser deposition (PLD) has been used extensively as it can maintain the stoichiometry of the target in the deposited film and also has high coverage ability, which both are important in capacitors. In this paper, Ba0.6Sr0.4TiO3 (BST) thin film has been deposited on the SiO2/Si substrate by pulsed laser deposition technique. The effect of post-annealed temperature, oxygen pressure deposition ambience and number of pulses on...
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