Design for Fabrication and Physical Parameter Optimization of Mems Parametric Exitation Gyrsocope

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Gholamzadeh, Reza | 2014

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Type of Document: M.Sc. Thesis
Language: Farsi
Document No: 46612 (08)
University: Sharif University of Technology
Department: Mechanical Engineering
Advisor(s): Salarie, Hassan
Abstract:
Recently, parametric excitation has been proposed and experimentally proven to provide micro gyroscopes with robustness to parameter variations and enhancement of sensitivity. harmonic excitation gyroscopes are very sensitive to response of a resonance at the resonant frequency; therefore it has to be created accurately. However, parametric excitation gyroscopes are not sensitive as a result of wide bound of frequency at drive mode, accordingly it is not necessary to be formed accurately in the same way as harmonic excitation gyroscope.
The produced stress at combs have a significance effect on robustness, sensitivity and calibration curves of parametric excitation gyroscope, as a result combs has to be designed and optimized for better performance. In this thesis we proposed new design for combs based on performance of parametric excitation gyroscope
Keywords:
Parametric Excitation ; Microelectromechanical Systems (MEMS) ; Gyroscope ; Optimal Design ; Physical Parameters Optimization

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