Design for Fabrication and Physical Parameter Optimization of Mems Parametric Exitation Gyrsocope, M.Sc. Thesis Sharif University of Technology ; Salarie, Hassan (Supervisor)
Abstract
Recently, parametric excitation has been proposed and experimentally proven to provide micro gyroscopes with robustness to parameter variations and enhancement of sensitivity. harmonic excitation gyroscopes are very sensitive to response of a resonance at the resonant frequency; therefore it has to be created accurately. However, parametric excitation gyroscopes are not sensitive as a result of wide bound of frequency at drive mode, accordingly it is not necessary to be formed accurately in the same way as harmonic excitation gyroscope.
The produced stress at combs have a significance effect on robustness, sensitivity and calibration curves of parametric excitation gyroscope, as a... Cataloging briefDesign for Fabrication and Physical Parameter Optimization of Mems Parametric Exitation Gyrsocope, M.Sc. Thesis Sharif University of Technology ; Salarie, Hassan (Supervisor)
Abstract
Recently, parametric excitation has been proposed and experimentally proven to provide micro gyroscopes with robustness to parameter variations and enhancement of sensitivity. harmonic excitation gyroscopes are very sensitive to response of a resonance at the resonant frequency; therefore it has to be created accurately. However, parametric excitation gyroscopes are not sensitive as a result of wide bound of frequency at drive mode, accordingly it is not necessary to be formed accurately in the same way as harmonic excitation gyroscope.
The produced stress at combs have a significance effect on robustness, sensitivity and calibration curves of parametric excitation gyroscope, as a... Find in contentBookmark |
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