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Analytical closed form model for static pull-in analysis in electrostatically actuated torsional micromirrors

Moeenfard, H ; Sharif University of Technology | 2013

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  1. Type of Document: Article
  2. DOI: 10.1007/s12206-013-0214-8
  3. Publisher: 2013
  4. Abstract:
  5. The objective of this work is to create an analytical framework to study the static pull-in and also equilibrium behavior in electrostatically actuated torsional micromirrors. First the equation governing the static behavior of electrostatic torsion micromirrors is derived and normalized. Perturbation method, the method of straight forward expansion is utilized to find the pull-in angle of the mirror. Comparison of the presented results with numerical ones available in the literature shows that the proposed second order perturbation expansion gives very precise approximations for the pull-in angle of the mirror. Then straightforward perturbation expansion method is used again to analytically simulate the voltage dependent behavior in electrostatic torsion micromirrors. The results are compared with numerical and experimental findings and excellent agreement is observed
  6. Keywords:
  7. Torsional micromirror ; Second order perturbation ; Closed-form models ; Electrostatic actuation ; Equilibrium behavior ; Perturbation expansions ; Perturbation method ; Straightforward perturbation expansion ; Static pull-in ; Torsional micromirrors ; Electrostatic actuators ; Electrostatics ; Mirrors ; Torsional stress ; Perturbation techniques
  8. Source: Journal of Mechanical Science and Technology ; Volume 27, Issue 5 , 2013 , Pages 1443-1449 ; 1738494X (ISSN)
  9. URL: http://link.springer.com/article/10.1007%2Fs12206-013-0214-8