Loading...
| Friend's email | |
| Your name | |
| Your email | |
| enter code | |
This page was sent successfuly
- Type of Document: M.Sc. Thesis
- Language: Farsi
- Document No: 49469 (05)
- University: Sharif University of Technology
- Department: Electrical Engineering
- Advisor(s): Rashidian, Bizhan
- Abstract:
- The fabrication of future electronic and optical devices will require advanced nanofabrication techniques that realize high spatial resolution and high precision in controlling size and position, and that are applicable to various materials. Near-field CVD (NF-CVD) was proposed to solve these problems with no need to perform nanolithography prcesses. NFCVD system has two major subsystems, first vacuum chamber and gas distribution system for delivering parent gases to the chamber and second, a nanopositiong system to keep the probe and the sample in the constant systems.In this dissertation we have set up a piezoelectric nanopositiong system and its driver modules. The positioning accuracy of piezoelectricactuators is limited by hysteresis over large displacements, creep, and thermal drift which is present at low-frequencies. Feedback control is the most commonly used technique for eliminating positioning errors in nanopositioning systems. In this thesis different controllers based on PI, PII and robust controllers have been designed and implemented; and experimental results of these feedback control techniques has been reported. Besides, Driver circuits for piezoelectric and stepper motors have been designed in implemented
- Keywords:
- Near Field ; Chemical Vapor Deposition (CVD) ; Nanopositioning ; Feedback Controller ; Nanofabrication
Digital Object List-
محتواي کتاب - view
Bookmark