Loading...

Dynamical Modeling and Control of an XY Nano-Positioner with Flexural Mechanism

Heravi, Mohammad | 2017

1961 Viewed
  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 49519 (08)
  4. University: Sharif University of Technology
  5. Department: Mechanical Engineering
  6. Advisor(s): Salarieh, Hasan; Nejat Pishkenari, Hossein
  7. Abstract:
  8. Nowadays, nano-positioners play an important role in advanced technologies, such as atomic force microscopy, genetic manipulation, nano-metrology, nano-fabrication, semi-conductors and etc.In this paper, a dynamical model has been derived for a nano-positioner. This nanopositioner was designed and fabricated in Sharif university of technology. In this paper the mentioned mechanism has been considered as a planar mechanism. First, a finite element model has been developed in Comsol multi-physics software. This model was used as the reference model in the next steps. Afterward, a 10 degrees of freedom model was proposed to estimate the Comsol model. The mass, stiffness, as well as damping matrices of the lumped model were obtained through parameter identification methods. The analytical model was verified by two sets of input. At low frequency, the error of estimation was negligible, while at the high frequency the error was considerable. At last, the first natural frequency of the model was verified by the finite element model. In the next step, three control strategies were applied to control the verified, uncertain model which has been developed in the peverious step. The three controller were PID, robust and feedforward, all of which were able to control the uncertain model. The robust controller had the best performance, but at a cost of a more complicated controller
  9. Keywords:
  10. Nano Positioner ; Robust Controller ; Feedforward Control ; Dynamic Modeling ; Compliant Mechanism

 Digital Object List

 Bookmark

...see more