Hardware Design for Cold Plasma Characterization Chamber

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Aghapour, Reza | 2021

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Type of Document: M.Sc. Thesis
Language: Farsi
Document No: 54886 (05)
University: Sharif University of Technology
Department: Electrical Engineering
Advisor(s): Rashidian, Bijan; Faez, Rahim
Abstract:
Cold plasma due to its special properties has many applications in the microelectronics industry. At the beginning of this study, a few examples of widely used plasmas and the requirements for driving their power sources have been investigated. To generate and characterize plasma, various topologies of DC power supply construction, including high-voltage low-current power supplies called multipliers and low-voltage high-voltage power supplies called converters, have been reviewed and compared.Circuit for pulse generating for plasma application has also been proposed and investigated. In the simulation section, after introducing, reviewing, and compareing the common types of simulators, the required circuits are simulated by two simulators named, PSIM and Pspice.In the Experimental section, substructure for grnerating high voltage power supplies up to about 160 kV and a high current of 3 A has been introduced. Finally, the high voltage power supply of the resonant multiplier is designed and built, which has the ability to combine the multiplier with the resonant circuit and increase the output voltage.
Keywords:
Full-Bridge Inverter ; Plasma ; Resonant Converter ; Plasma Power Sources ; X Ray Power Supplies ; Capacitor Charging Power Supplies ; Cockcroft Walton Power Supplies

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