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Measuring small displacements by using a capacitive transducer system

Golnabi, H ; Sharif University of Technology | 2000

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  1. Type of Document: Article
  2. Publisher: Sharif University of Technology , 2000
  3. Abstract:
  4. In this paper, application of a capacitive sensor system in recording small displacements is discussed. Through using a simple transducer and a monitoring circuit, change in capacitance has been detected as a function of the capacitor air-gap distance. There is a linear relation between gap distance and output of a sensor for a wide gap range of 0.5 to 5 mm. The reported system provides means for measuring displacements up to 5 mm with a resolution better than 250 nm. By decreasing the dynamic range of the transducer to 250 μm, a small displacement of the order of 100 nm is detectable. With the present system, a minimum displacement of about 200 nm (200 ppm) for the gap distance of 1 mm is obtained. However, through changing the sensor design, the measuring circuit becomes capable of recording smaller distances of the order of 10 nm at this operating range
  5. Keywords:
  6. Capacitor ; Transducer ; Sensor ; Measuring instrument ; Displacement
  7. Source: Scientia Iranica ; Volume 7, Issue 1 , 2000 , Pages 69-74 ; 10263098 (ISSN)
  8. URL: http://scientiairanica.sharif.edu/article_2822.html